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Investigation of laser-induced-metal phase of MoTe2 and its contact property via scanning gate microscopy.

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Although semiconductor to metal phase transformation of MoTe2by high-density laser irradiation of more than 0.3 MW/cm2has been reported, we reveal that the laser-induced-metal (LIM) phase is not the 1T' structure… Click to show full abstract

Although semiconductor to metal phase transformation of MoTe2by high-density laser irradiation of more than 0.3 MW/cm2has been reported, we reveal that the laser-induced-metal (LIM) phase is not the 1T' structure derived by a polymorphic-structural phase transition but consists instead of semi-metallic Te induced by photo-thermal decomposition of MoTe2. The technique is used to fabricate a field effect transistor with a Pd/2H-MoTe2/LIM structure having an asymmetric metallic contact, and its contact properties are studied via scanning gate microscopy. We confirm that a Schottky barrier (a diffusion potential) is always formed at the Pd/2H-MoTe2boundary and obstacles a carrier transport while an Ohmic contact is realized at the 2H-MoTe2/LIM phase junction for both n- and p-type carriers.

Keywords: phase; laser; microscopy; mote2; contact; metal phase

Journal Title: Nanotechnology
Year Published: 2020

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