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The combined processes of self-sputter (SS)-recycling and process gas recycling in high power impulse magnetron sputtering (HiPIMS) discharges are analyzed using the generalized recycling model (GR ... Click to show full abstract
The combined processes of self-sputter (SS)-recycling and process gas recycling in high power impulse magnetron sputtering (HiPIMS) discharges are analyzed using the generalized recycling model (GR ...
Keywords:
process gas;
power impulse;
high power;
gas recycling
Journal Title: Plasma Sources Science and Technology
Year Published: 2017
Link to full text (if available)
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Journal Title: Plasma Sources Science and Technology
Year Published: 2017
Link to full text (if available)
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recommendations!