"Formation of ${\mathrm{Cu}}_{n}^{+}$ ($n=1-3$), ${\mathrm{Ar}}_{n}^{+}$ (n = 1, 2), and ArCu+ ions during sputtering of a copper surface by low-energy Ar+ ion bombardment in a dilute argon atmosphere"

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Formation of ${\mathrm{Cu}}_{n}^{+}$ ($n=1-3$), ${\mathrm{Ar}}_{n}^{+}$ (n = 1, 2), and ArCu+ ions during sputtering of a copper surface by low-energy Ar+ ion bombardment in a dilute argon atmosphere

Formation of monoatomic Ar+ and Cu+, diatomic , ArCu+, and , and triatomic ions during 500 eV Ar+ ion bombardment of a copper surface in a dilute argon atmosphere was… Click to show full abstract

Formation of monoatomic Ar+ and Cu+, diatomic , ArCu+, and , and triatomic ions during 500 eV Ar+ ion bombardment of a copper surface in a dilute argon atmosphere was investigated by means of energy-resolved mass spectrometry. Energy spectra of (n = 1, 2), (), and ArCu+ ions show distinct features which are related to the specific formation processes taking place in the plasma region and during ion bombardment of the Cu cathode.

Keywords: energy; ion bombardment; formation; mathrm

Journal Title: Plasma Sources Science and Technology
Year Published: 2018

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