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Review and current status: E ⇌ H mode transition in low-temperature ICP and related electron dynamics

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It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H transition in a low-temperature inductively coupled plasma (ICP), sustained… Click to show full abstract

It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H transition in a low-temperature inductively coupled plasma (ICP), sustained by a radiofrequency (RF) power. E ⇌ H transitions are fully 2D or 3D phenomena, and non-invasive optical spectroscopy is appropriate for such studies. One example is a 1D-t image during one RF period. Another example is a 2D or 3D snapshot at each phase of the transition, captured using in computerized emission tomography. Most studies have been performed in argon, oxygen, or their mixture in an ICP driven at 13.56 MHz. In the present paper we review and explore the past three decades of research into the electron dynamics related to plasma sustenance at each phase of the E–H and H–E transitions, including our new results. The hysteresis of the internal plasma parameters as a function of external parameter is discussed in terms of a change of species density, particularly long-lived metastables in plasma in the bidirectional E–H transition.

Keywords: electron dynamics; transition low; icp; low temperature; transition

Journal Title: Plasma Sources Science and Technology
Year Published: 2020

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