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We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are… Click to show full abstract
We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are identified in several physical quantities, which are sculptured by the trajectories of bouncing energetic electrons (predominantly ion induced secondary electrons) under the influence of the spatio-temporally varying electric field. Based on a systematic parameter variation the generation of the various features as a function of surface processes is explained and the trajectories of electrons of different origin are identified.
Journal Title: Plasma Sources Science and Technology
Year Published: 2021
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