LAUSR

© 2018 IOP Publishing Ltd. Chlorine-doped tungsten disulfide monolayer (1L-WS 2 ) with tunable charge carrier concentration has been realized by pulsed laser irradiation of the atomically thin lattice in a precursor gas atmosphere. This process gives rise to a systematic shift of the neutral exciton peak towards lower energies, indicating reduction of the crystal's electron density. The capability to progressively tune the carrier density upon variation of the exposure time is demonstrated; this indicates that the Fermi level shift is directly correlated to the respective electron density modulation due to the chlorine species. Notably, this electron withdrawing process enabled the determination of the trion binding energy of the intrinsic crystal, found to be as low as 20 meV, in accordance to theoretical predictions. At the same time, it is found that the effect can be reversed upon continuous wave laser scanning of the monolayer in air. Scanning auger microscopy (SAM) and x-ray photoelectron spectroscopy (XPS) are used to link the actual charge carrier doping to the different chlorine configurations in the monolayer lattice. The spectroscopic analyses, complemented by density functional theory calculations, reveal that chlorine physisorption is responsible for the carrier density modulation induced by the pulsed laser photochemical reaction process. Such bidirectional control of the Fermi level, coupled with the capability offered by lasers to process at pre-selected locations, can be advantageously used for spatially resolved doping modulation in 1L-WS 2 with micrometric resolution. This method can also be extended for the controllable doping of other TMD monolayers.