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Observation of in-plane shear stress fields in off-axis SiC wafers by birefringence imaging

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Theoretical consideration and experimental demonstration reveal that the contrast variation in a birefringence image of an off-axis SiC wafer corresponds to the in-plane shear stress field. Click to show full abstract

Theoretical consideration and experimental demonstration reveal that the contrast variation in a birefringence image of an off-axis SiC wafer corresponds to the in-plane shear stress field.

Keywords: plane shear; observation plane; axis sic; birefringence; shear stress

Journal Title: Journal of Applied Crystallography
Year Published: 2022

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