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A new theoretical approach for computing the focusing performance of X-ray optics with circularly symmetry shape was developed. Greyscale electron beam lithography was applied to generate 3D kinoform zones in… Click to show full abstract
A new theoretical approach for computing the focusing performance of X-ray optics with circularly symmetry shape was developed. Greyscale electron beam lithography was applied to generate 3D kinoform zones in Au for hard X-rays for the first time. The novel trapezoid kinoform zone plate lens demonstrates significantly high diffraction efficiency well beyond that of conventional X-ray optics.
Keywords:
zone plate;
ray optics;
optics;
trapezoid kinoform;
kinoform zone
Journal Title: Journal of Synchrotron Radiation
Year Published: 2022
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Journal Title: Journal of Synchrotron Radiation
Year Published: 2022
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!