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Data-driven modeling and control of an X-ray bimorph adaptive mirror

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A framework for data-driven characterization of the nonlinear dynamics of a piezo-bimorph adaptive X-ray mirror has been developed. Rapid surface shape control and stability to within 2 nm RMS have been… Click to show full abstract

A framework for data-driven characterization of the nonlinear dynamics of a piezo-bimorph adaptive X-ray mirror has been developed. Rapid surface shape control and stability to within 2 nm RMS have been demonstrated.

Keywords: bimorph adaptive; mirror; control; ray; data driven; driven modeling

Journal Title: Journal of Synchrotron Radiation
Year Published: 2023

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