LAUSR.org creates dashboard-style pages of related content for over 1.5 million academic articles. Sign Up to like articles & get recommendations!

Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A Comparison Among Numerical Techniques for Recovering the Membrane Profile

Photo by saadahmad_umn from unsplash

In this work, numerical techniques based on Shooting procedure, Relaxation scheme and Collocation technique have been used for recovering the profile of the membrane of a $1D$ electrostatic Micro-Electro-Mechanical-Systems (MEMS)… Click to show full abstract

In this work, numerical techniques based on Shooting procedure, Relaxation scheme and Collocation technique have been used for recovering the profile of the membrane of a $1D$ electrostatic Micro-Electro-Mechanical-Systems (MEMS) device whose analytic model considers $|\mathbf {E}|$ proportional to the membrane curvature. The comparison among these numerical techniques has put in evidence the pros and cons of each numerical procedure. Furthermore, useful convergence conditions which ensure the absence of ghost solutions, and a new condition of existence and uniqueness for the solution of the considered differential MEMS model, are obtained and discussed.

Keywords: tex math; electrostatic micro; membrane; inline formula; micro electro; numerical techniques

Journal Title: IEEE Access
Year Published: 2020

Link to full text (if available)


Share on Social Media:                               Sign Up to like & get
recommendations!

Related content

More Information              News              Social Media              Video              Recommended



                Click one of the above tabs to view related content.