Accurate measurement of the spatial angle is key for plane flatness and guide rail straightness detection. This paper presents a lens-array-based optical system and an analytical model for micro-spatial angle… Click to show full abstract
Accurate measurement of the spatial angle is key for plane flatness and guide rail straightness detection. This paper presents a lens-array-based optical system and an analytical model for micro-spatial angle measurements. In this system, a collimated light beam passes through four-array lenses arranged in a pyramid shape and forms regular array spots on a charge-coupled device sensor. The angles with respect to the
               
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