LAUSR

A silicon-based on-chip ultra-sharp multimode waveguide bend (MWB) is proposed to work for dual polarizations by introducing modified Euler-curves and shallowly-etched non-uniform subwavelength-gratings (SWGs). For the designed 90° MWB with a core width of 1.01 μm and an effective bending radius as small as 10 μm, the excess losses are less than 0.23 dB and the inter-mode crosstalk is lower than <−26.5 dB over a broad band from 1500 nm to 1600 nm for six mode-channels, including three TE-polarization modes and three TM-polarization modes. It shows a great improvement compared to a regular 90° arc-bend.