This letter identifies the source of linear acceleration signal in the microelectromechanical systems (MEMS) thermal gyroscope and provides a real-time solution to exclude it. The main culprit of the undesired… Click to show full abstract
This letter identifies the source of linear acceleration signal in the microelectromechanical systems (MEMS) thermal gyroscope and provides a real-time solution to exclude it. The main culprit of the undesired acceleration signal is found to be lack of rotational symmetry due to Manhattan sensor topology. A higher level of symmetry is obtained by constructing a hybrid gyroscope using two individual devices operating in tandem but 180° out-of-phase. A precision rotary stage is used to test the duo. The experiments confirmed that higher symmetry is promising in excluding the acceleration signal. Compared with a single device, the hybrid gyroscope demonstrated 16-fold reduction in the acceleration signal and 5-fold improved acceleration to rotation sensitivities. [2017-0171]
               
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