A bi-stable MEMS switch is introduced in this letter. For the first time, the timing sequence of this switch is generated by an additional mass block rather than an external… Click to show full abstract
A bi-stable MEMS switch is introduced in this letter. For the first time, the timing sequence of this switch is generated by an additional mass block rather than an external circuit or active chip. To prove the effectiveness of this method, the switch was fabricated and tested. As a result, the device could complete the action in 8 ms, under the condition of a 25-V driving voltage. That is to say, it has been verified the approach of inertial generated timing sequence is an effective solution to construct a bi-stable MEMS switch, and no external circuit or active chip is needed. [2018-0283]
Journal Title: Journal of Microelectromechanical Systems
Year Published: 2019
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