A microcantilever at the end face of an integrated optical fiber is reported, fabrication is uniquely achieved using a precision dicing saw. The methodology is a single-step rapid process, capable… Click to show full abstract
A microcantilever at the end face of an integrated optical fiber is reported, fabrication is uniquely achieved using a precision dicing saw. The methodology is a single-step rapid process, capable of achieving trenches with high aspect ratio (>10:1). The platform on which fabrication is made is a monolithic, integrated optical fiber. This integrally fuses optical fiber to a planar substrate using flame hydrolysis deposition and high temperature consolidation (>1000 °C). This paper is the first report of a fiber-tip cantilever using the technique and this integrated platform. As an approach to quantify the optical response of such a multicavity arrangement, a method using Mason’s rule is presented. This is used to infer the spectral responses of individual cavities formed and through physical actuation, an estimation of the cantilever’s spring constant is made.
               
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