LAUSR

A novel cobweb-like disk resonator gyroscope (CDRG) with a very small frequency split between two degenerate modes has been designed and implemented. In comparison with the ring-like DRG (RDRG), the CDRG has fewer fabrication imperfections owing to its all-linear structure. In addition, the CDRG displays a superior nonlinear effect compared with the RDRG, and internal differential electrode excitation and detection were used to further reduce the nonlinear effect. The CDRGs and RDRGs were placed side by side on the same wafer, and the characteristics of these as-fabricated resonators were then tested. The results showed that the resonant frequencies and Q-factors of the CDRGs and RDRGs were approximately 18 kHz and nearly 100k, respectively. The smallest as-fabricated relative frequency split (29.9 ppm) of the CDRGs was about 10.8 times smaller than that (322.5 ppm) of an RDRG built side by side on the same wafer, which had the lowest relative frequency split among all current disk resonator gyros. Finally, the preliminary results for the performance of the CDRG and RDRG in the force-to-rebalance mode and mode matching are given. Under the same conditions, the maximum vibration displacement, scale factor, angular random walk, and bias instability of the CDRG were improved by 62.8%, 112%, 700%, and 314%, respectively, compared with the RDRG.