LAUSR

In this letter, we report a performance enhanced thermopile with rough dielectric film black. The pyramidally-textured structure is in-situ formed in the thin dielectric film as an infrared absorber by hard-molding method. Compared to flat dielectric film-based thermopile with the same size, the output voltage, responsivity, and detectivity of the thermopile with rough dielectric film black can be improved by approximately 38%, while the response time constant remains less than 10 ms. The pyramidally- textured dielectric film provides a new opportunity to enhance the performance of thermopiles with the simple process as well as low cost.