LAUSR

A defect diagnosis procedure is an important part of the yield improvement process. As defects become more complex, the output responses they produce differ to larger extents from the output responses of modeled faults, and they become more difficult to diagnose. Biases in the defect diagnosis procedure can also cause defects to be more difficult to diagnose. It is important to study and remove such biases in order to ensure that they do not affect the accuracy of the procedure. This paper undertakes a study of the biases of a defect diagnosis procedure and suggests a way to improve it. The study illustrates an approach by which biases in defect diagnosis procedures can be analyzed in general.