Microfluidic large-scale integration (mLSI) is a promising lab-on-a-chip platform for high-throughput bio-applications. Due to the high integration scale and the small feature size, control channels on mLSI chips are prone… Click to show full abstract
Microfluidic large-scale integration (mLSI) is a promising lab-on-a-chip platform for high-throughput bio-applications. Due to the high integration scale and the small feature size, control channels on mLSI chips are prone to blockage and leakage defects, which may lead to faulty behavior of valves and erroneous experimental results. Thus, mLSI chips need to be tested before usage. Current mLSI-tests are mostly performed in a straightforward way by testing each valve individually, which is very time consuming and error prone. As the integration scale of mLSI chips keeps increasing, there is a pressing demand for more efficient test approaches. This work proposes the first built-in-self-test (BIST) method for mLSI with an integrated test module design. Instead of testing individual valves, the proposed method directly tests the control channels and thus greatly improves the test efficiency. Only
               
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