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Insights on the Body Charging and Noise Generation by Impact Ionization in Fully Depleted SOI MOSFETs

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Thin and ultrathin body-contacted Silicon-on-Insulator MOS-transistors have been used for the direct experimental measurement of the stationary body potential and impact ionization current generated at moderate and high electric field… Click to show full abstract

Thin and ultrathin body-contacted Silicon-on-Insulator MOS-transistors have been used for the direct experimental measurement of the stationary body potential and impact ionization current generated at moderate and high electric field regimes. The large influence of the channel length on the evolution of the body potential as well as the severe loss of electrostatic control of the body by the gate terminal due to the hole injection have been successfully monitored through the body-contact. In our short devices, the impact ionization current tends to saturate as the gate bias increases for high values of the drain bias, whereas the impact ionization ratio has been found to be larger at low inversion charge. At moderate impact ionization regime, an update set of experimentally extracted ionization coefficients have been proposed revealing significant differences with the ones used in bulk technologies. Finally, low-frequency noise characterization has shown the impact ionization contribution to the fluctuation of the drain current. The power spectral density of the noise at the body-contact of the transistor has revealed the signature of the parasitic bipolar triggering at high impact ionization regime.

Keywords: impact ionization; body charging; ionization; insights body

Journal Title: IEEE Transactions on Electron Devices
Year Published: 2017

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