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Asymmetric-Structure-Induced Self-Rectifying in Nanoscale HfO2-Based RRAM Array

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Self-rectifying using a pure HfO2 layer with asymmetric structure was realized in Pt/HfO2/n+-Si resistive random access memory (RRAM). The device exhibits repeatable self-rectifying behavior with high rectifying ratio (>105). The… Click to show full abstract

Self-rectifying using a pure HfO2 layer with asymmetric structure was realized in Pt/HfO2/n+-Si resistive random access memory (RRAM). The device exhibits repeatable self-rectifying behavior with high rectifying ratio (>105). The electrostatic effect induced by the asymmetric structure of the HfO2 layer is responsible for the rectifying behavior. This kind of rectifying paves a new way for resolving the sneak current issue in RRAM arrays.

Keywords: sub; hfo sub; sup; self rectifying; asymmetric structure

Journal Title: IEEE Transactions on Electron Devices
Year Published: 2019

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