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Advanced Fabrication of Vacuum Electron Devices

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RF source scientist and engineers continuously push the envelope with new designs, striving for improved performance with higher efficiency, higher frequency, greater bandwidth, increased gain, smaller size, lower voltage, and… Click to show full abstract

RF source scientist and engineers continuously push the envelope with new designs, striving for improved performance with higher efficiency, higher frequency, greater bandwidth, increased gain, smaller size, lower voltage, and myriad other parameters required for ever more demanding applications. Invariably, it becomes more challenging to achieve the required fabrication and assembly performance with increasing complexity and precision. This publication reviews recent development on advanced fabrication technologies and describes the current state of the art in machining, assembly, and alignment capabilities.

Keywords: devices advanced; vacuum electron; fabrication vacuum; fabrication; electron devices; advanced fabrication

Journal Title: IEEE Transactions on Electron Devices
Year Published: 2023

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