LAUSR

In this article, an XY parallel nanomanipulator with multiple actuation modes (PNM) is proposed, analyzed, and tested. Arising from the parallel mechanism of a machine tool, the PNM is featured with multiple actuation modes and configurable parallel chains. Analytical models with different approaches are established to compressively understand the presented PNM. Workspace distribution and reachability are analyzed under different actuation modes in a detail manner. The models also reveal the combined effect of multiple modes and the influence of chain arrangement on the achieved workspace and the stiffness property. Dynamic analysis indicates that PNM is with high bandwidth as well. Finite element analysis and experiments were carried out to verify the above analysis results. Finally, a compound decoupled controller is especially designed for PNM to achieve the decoupling motion control. Planar trajectory-tracking tests demonstrate the feasibility and effectiveness of proposed control method.