LAUSR

The scanning laser Doppler vibrometer (SLDV) is an extremely valuable method for studying the dynamic properties of vibrating objects, such as those in industrial production, entomology research, and biomedical testing. The traditional SLDV method scans samples using an inclined laser, which ignores the three-dimensional (3-D) information of the sample, resulting in a relatively complicated calculation process. In industrial processes and scientific research, the measured target may have a known 3-D regular surface. When a structure with height information moves laterally, it causes a change in longitudinal information, which is of great benefit in the analysis of the 3-D vibration and displacement information of the target. In this article, continuous and interval scanning laser Doppler methods are proposed to expand the measuring capability of SLDV methods, based on the scanning of spherical structures. First, a spherical structure is introduced to simplify the solution to spiral vibrations. The high-precision displacement can also be calculated by fitting the circular scanning curve. Finally, the scanning method for 3-D displacement measurement is experimentally validated, and the theoretical errors are demonstrated. This work provides a new methodology to realize both periodic and nonperiodic displacements in all degrees of freedom (DOF) with high accuracy using a single-point SLDV, which is expected to have a long-term impact on industry vibration analysis and biological motion research. Most importantly, setting a reflector with a spherical surface on the end-effector of the micro–nano robot can realize the 3-D cross-scale repeated localization.