LAUSR

This paper presents integrated inductors with Co-Zr-Ta-B (CZTB) thin films on flexible organic substrates for MHz–GHz applications. This paper demonstrated the fabrication and characterization of magnetic thin-film inductors on flexible organic substrates, such as polyimide and Ajinomoto build-up film thin films. These films have thicknesses of only tens of micrometer and thus are very flexible compared to the same inductor structures fabricated on rigid substrates, such as quartz. The magnetic films on flexible substrates were observed to maintain similar magnetic properties compared with those on Si substrate, but with greater coercivity likely due to the increased roughness of the substrate surface. The fabricated thin-film inductors on organic substrates with inductance $L$ , measured by RF characteristics, have shown significantly increased inductance compared to air-core inductors (without magnetic core materials). This paper also demonstrated a high frequency response, clearly over GHz, consistent with the CZTB type of materials. The frequency response, as well as inductance and Q values, remains similar even after many iterations of bending to a large degree, indicating the robustness of the inductor on flexible organic substrates, as well as that of the magnetic thin films.