An improvement in the energy transfer in a cavity-type microwave plasma source (MPS) operated at 915 MHz by a better design of the device, capable of ensuring a high microwave… Click to show full abstract
An improvement in the energy transfer in a cavity-type microwave plasma source (MPS) operated at 915 MHz by a better design of the device, capable of ensuring a high microwave power coupling from the supply line to the sustained plasma was a goal of this paper. Our approach was twofold. First, numerical simulations of an electromagnetic field distribution inside a typical cavity-type MPS were carried out. The standard model of homogeneous plasma generated by the MPS and the two-port method was combined. This enabled estimating the concentration
               
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