In this work, a novel design scheme for a high-performance surface acoustic wave (SAW) filter with dual acoustic mode hybrid integration is proposed. Based on X-cut LiNbO3/SiO2/SiC (LNOSiC) hetero-substrate, the… Click to show full abstract
In this work, a novel design scheme for a high-performance surface acoustic wave (SAW) filter with dual acoustic mode hybrid integration is proposed. Based on X-cut LiNbO3/SiO2/SiC (LNOSiC) hetero-substrate, the dual-mode ladder-type filter employs the high-electromechanical-coupling shear horizontal (SH) mode as the main mode for parallel resonators and high-power longitudinal leaky (LL) mode for series resonators, respectively. The fabricated hybrid dual-mode filter aiming at the n79 band shows a large 3-dB fractional bandwidth (FBW)
               
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