LAUSR

This work demonstrates the ultrasonic imaging ability of piezoelectric micromachined ultrasonic transducer (PMUT) for the detection of defects deep in solids by total-focus imaging algorithm. The 3-MHz PMUT array uses thin-film PZT as the material for energy transformation because of its high piezoelectric coefficient. Six columns with 12 PMUT units each exhibit an acoustic pressure of 137 kPa measured in water at 1 cm away when driven by a 27-Vpp input. Butter is chosen experimentally as the coupling agent to solids because of its low noise level and short cycling down. Through multilevel processing of echoes and total-focus algorithm, the 2-D image of a graphite plant was obtained with four holes identified based on our customized impedance-matched imaging system. The 16 columns of PMUT array with an area of 5.8 mm $\times4.2$ mm exhibit the imaging ability of an area of 40 mm $\times40$ mm in the graphite plant with identified defects deep as 3 cm. These results indicate that PMUT has the detection and imaging ability for defects deep in solids, not merely surface within hundreds of micrometers, and it has the potential for 3-D imaging, especially those occasions in limited space.