LAUSR

In this paper, a dynamics model of a microresonant gas sensor under multifields forces is proposed in which molecular force nonlinearity, gas damping force nonlinearity, and electric field force nonlinearity are considered. The coupled free vibration and forced response of the microsensor are studied. Here, Leibniz–Poincare (L–P) method is used to obtain the natural frequency of microsensor, the time-forced response, and the amplitude–frequency characteristics. Effects of these nonlinearities on the dynamics performance of the microresonant gas sensor are analyzed. The microresonant gas sensor is fabricated, and the frequency measurement of the sensor based on the phase-locked loop is done to illustrate the theoretical analysis. The results are significant for the further miniaturization of resonant gas sensors.