LAUSR

Abstract. Design guidelines for a guided-wave optical pressure sensor based on dependences of sensitivity and resonance frequency on diaphragm dimensions were considered. The guided-wave optical pressure sensor consists of a diaphragm and a single-mode waveguide on the diaphragm. According to our theoretical study, the edge of the diaphragm was found to be the best position to obtain the highest sensitivity. Also, sensitivity is proportional to the cube of the side length of the diaphragm but inversely proportional to the square of the diaphragm thickness. On the other hand, resonance frequency of the diaphragm is proportional to the diaphragm thickness and inversely proportional to the square of the side length. Dependences were experimentally examined for fabricated sensors with different diaphragm dimensions to confirm theoretical predictions. The experimental results agreed well with the theoretical predictions. Moreover, a design assistant chart for the sensor was proposed based on the dependences.