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The effect of the type of Si conductivity on the initiation and formation of pores in silicon samples during electrochemical etching was studied. The difference between the pore formation processes… Click to show full abstract
The effect of the type of Si conductivity on the initiation and formation of pores in silicon samples during electrochemical etching was studied. The difference between the pore formation processes in n- and p-conducting silicon was attributed to the properties and the nature of layers formed in the initial period of etching on the Si surface. A possible composition of the layers formed on the Si surface was proposed considering the chemistry of Si interaction with the etching agent.
Keywords:
conductivity initiation;
chemistry;
formation;
effect type;
initiation formation;
type conductivity
Journal Title: Doklady Chemistry
Year Published: 2017
Link to full text (if available)
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Journal Title: Doklady Chemistry
Year Published: 2017
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!