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Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem

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A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional… Click to show full abstract

A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a superposition of Gaussians, whose parameters are related to the characteristics of the film layers and interfaces. The potential of this method is demonstrated by a number of model examples.

Keywords: film; synthesis; thin film; autocorrelation function

Journal Title: Crystallography Reports
Year Published: 2019

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