Results of experiments on a linear facility with a helicon plasma source operating at a frequency of 13.56 MHz and a power of up to 15 kW are reported. In… Click to show full abstract
Results of experiments on a linear facility with a helicon plasma source operating at a frequency of 13.56 MHz and a power of up to 15 kW are reported. In the experiments, different antennas (coil, NAGOYA TYPE III, and half-wave helicon) with azimuthal wavenumbers of m = 0, ±1 were used. Plasma density and electron temperature radial profiles for antennas of these types were measured as a function of the magnetic field under the antenna and the gas pressure. The maximum plasma density obtained in the experiments was 2 × 1013 cm–3 at a magnetic field of ~200 G.
               
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