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Atomic-Force Microscopy Probe-Activated Morphological Transformations in a Nanophase Copper Wetting Layer on Silicon

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The phase transition of the nanophase Cu2Si wetting layer on a Si(001) substrate to more stable Cu silicide has been selectively activated by atomic-force microscopy in air. The transition is… Click to show full abstract

The phase transition of the nanophase Cu2Si wetting layer on a Si(001) substrate to more stable Cu silicide has been selectively activated by atomic-force microscopy in air. The transition is accompanied by an increase in the lateral size and height of grains and a decrease in their density. The effect that has been identified can be used to form ordered nanoisland ensembles and in nanolithography.

Keywords: microscopy; force microscopy; microscopy probe; atomic force; wetting layer

Journal Title: Technical Physics Letters
Year Published: 2018

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