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The interatomic binary potentials of Mo-Mo, Mo-S and S-S, approved by Molecular Dynamics, were used to calculate elastic phase shifts and cross sections of the atomic pairs in the relative… Click to show full abstract
The interatomic binary potentials of Mo-Mo, Mo-S and S-S, approved by Molecular Dynamics, were used to calculate elastic phase shifts and cross sections of the atomic pairs in the relative kinetic energy range of 2–200 eV. It is expected the obtained differential and integral cross sections to be of help to describe sputtering of MoS2 nanometer layers in design of perspective devices of nanoelectronics and photonics.
Keywords:
relative kinetic;
kinetic energy;
atomic pairs;
pairs relative;
energy range;
range 200
Journal Title: Technical Physics Letters
Year Published: 2018
Link to full text (if available)
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Journal Title: Technical Physics Letters
Year Published: 2018
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!