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A New Approach to TOF-SIMS Analysis of the Phase Composition of Carbon-Containing Materials

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New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra… Click to show full abstract

New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C8/C5 and CsC8/CsC4. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.

Keywords: composition carbon; analysis phase; phase composition; carbon; sims analysis; phase

Journal Title: Technical Physics Letters
Year Published: 2019

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