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Properties of Resistive Structures Based on Gallium Oxide Polymorphic Phases

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The effect of UV radiation and a strong electric field on the current–voltage characteristics of resistive structures based on polymorphic gallium oxide (Ga2O3) films is discussed. Ga2O3 films were deposited… Click to show full abstract

The effect of UV radiation and a strong electric field on the current–voltage characteristics of resistive structures based on polymorphic gallium oxide (Ga2O3) films is discussed. Ga2O3 films were deposited by the method of halide vapor phase epitaxy (HVPE) on smooth and patterned sapphire substrates with a baseline orientation (0001). α-Ga2O3 films grow on smooth substrates, and gallium oxide films containing α and e phases grow on patterned ones. A switching effect was detected in the metal/Ga2O3/metal structures based on two-phase films. When exposed to radiation with λ = 254 nm and a strong electric field, the structures pass from a low resistive state to a high resistive state.

Keywords: structures based; properties resistive; ga2o3 films; resistive structures; gallium oxide

Journal Title: Technical Physics Letters
Year Published: 2020

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