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Thin polycrystalline Cr2O3 films were obtained using RF magnetron sputtering followed by annealing in air at T = 673 K. The obtained films had grain diameters within 40–70 nm and… Click to show full abstract
Thin polycrystalline Cr2O3 films were obtained using RF magnetron sputtering followed by annealing in air at T = 673 K. The obtained films had grain diameters within 40–70 nm and a bandgap width of 3.3 ± 0.2 eV. In a temperature range of 303–473 K, sensors based on these Cr2O3 films exhibited high response to NO2, H2, acetone and toluene vapors, while weakly responding to the presence of CH4 and CO and showing relatively weak dependence of the electric resistance on air humidity. A qualitative model of the influence of gases on the electrical properties of thin Cr2O3 films is proposed.
Journal Title: Technical Physics Letters
Year Published: 2020
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