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Chemical solution deposited thin films of titanium, chromium, zirconium, and tin oxides

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TiO2, Cr2O3, ZrO2, and SnO2 films with thicknesses of ∼10–100 nm were produced via dipping into solution and subsequent annealing in air. The films were studied by the methods of… Click to show full abstract

TiO2, Cr2O3, ZrO2, and SnO2 films with thicknesses of ∼10–100 nm were produced via dipping into solution and subsequent annealing in air. The films were studied by the methods of scanning electron microscopy, elemental X-ray spectral analysis, optical spectroscopy, and X-ray diffraction. The electrical conductivity of the films in air and in a vacuum was measured. The adhesion of most of the films to the substrate was found to be high. A crystalline structure was observed for films thicker than 10 nm. The films have a specific surface resistance of 108–1012 Ω in air and 109–1014 Ω in a vacuum. The films are promising as coatings for various purposes, including the development of structures of the core–shell type.

Keywords: thin films; chemical solution; solution deposited; films titanium; solution; deposited thin

Journal Title: Russian Journal of Applied Chemistry
Year Published: 2017

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