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In this work, on-chip spiral inductors with back hollow structure have been prepared on the 500 μm thick silicon substrate with high resistivity (ρ > 5000Ωcm). The silicon underneath the inductor… Click to show full abstract
In this work, on-chip spiral inductors with back hollow structure have been prepared on the 500 μm thick silicon substrate with high resistivity (ρ > 5000Ωcm). The silicon underneath the inductor r...
Keywords:
hollow structure;
inductors back;
spiral inductors;
chip spiral;
back hollow
Journal Title: Modern Physics Letters B
Year Published: 2017
Link to full text (if available)
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Journal Title: Modern Physics Letters B
Year Published: 2017
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!