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Aiming at the problem of heterogeneity of sealed cavity in silicon microstructure processing technology, the technology of preparing micro-cavity by using porous silicon sacrificial layer is propos... Click to show full abstract
Aiming at the problem of heterogeneity of sealed cavity in silicon microstructure processing technology, the technology of preparing micro-cavity by using porous silicon sacrificial layer is propos...
Keywords:
micro cavity;
porous silicon;
cavity;
silicon;
processing technology
Journal Title: Modern Physics Letters B
Year Published: 2020
Link to full text (if available)
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Journal Title: Modern Physics Letters B
Year Published: 2020
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!