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TiO2 thin films were deposited on quartz substrate by RF-magnetron sputtering technique. The effect of varying oxygen fraction f(O2) = (O2/(Ar + O2) on the surface morphology, structure, electrical... Click to show full abstract
TiO2 thin films were deposited on quartz substrate by RF-magnetron sputtering technique. The effect of varying oxygen fraction f(O2) = (O2/(Ar + O2) on the surface morphology, structure, electrical...
Keywords:
influence oxygen;
tio2 films;
dispersion parameters;
oxygen deficiency;
deficiency dispersion;
parameters tio2
Journal Title: Modern Physics Letters B
Year Published: 2021
Link to full text (if available)
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Journal Title: Modern Physics Letters B
Year Published: 2021
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!