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Study on the properties of zinc oxide films with different CF4 flow rates

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In this research, we will show that as the flow rates of CF4 (CF4/(Ar + CF4)) are different, the optical, crystal, and electrical properties of FZO films have large variations.… Click to show full abstract

In this research, we will show that as the flow rates of CF4 (CF4/(Ar + CF4)) are different, the optical, crystal, and electrical properties of FZO films have large variations. At first, ZnO target...

Keywords: flow rates; cf4; study properties; flow; properties zinc; zinc oxide

Journal Title: Modern Physics Letters B
Year Published: 2021

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