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Structural and electrical properties of ferroelectric BiFeO3/HfO2 gate stack for nonvolatile memory applications

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Difficulties in the fabrication of direct interface of ferroelectric BiFeO3 on the gate of ferroelectric field effect transistor (FeFET) is well known. This paper reports the optimization and fabri... Click to show full abstract

Difficulties in the fabrication of direct interface of ferroelectric BiFeO3 on the gate of ferroelectric field effect transistor (FeFET) is well known. This paper reports the optimization and fabri...

Keywords: properties ferroelectric; structural electrical; ferroelectric bifeo3; gate; bifeo3; electrical properties

Journal Title: Journal of Advanced Dielectrics
Year Published: 2018

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