LAUSR

The crystal-ion-slicing technology is a promising technology for fabricating high-quality single crystal piezoelectric thin films. This work attempted to investigate the influence of annealing ambience on the properties of LiTaO3 thin films fabricated by crystal-ion-slicing technology. Here, two 4-inch 42° rotated Y-X propagation LiTaO3 thin films were fabricated, as well as the LiTaO3 thin films were annealed in vacuum and O2 environment, respectively. The results demonstrate that the LiTaO3 thin films annealed in O2 environment possesses more homogeneous and denser structure and fewer defects. The Zratio of the resonators fabricated on the LiTaO3 thin films annealed in O2 environment is approximately 85.3 dB and the Q-factor reaches 5107, indicating the excellent piezoelectric properties of thin films.