LAUSR

Both the magnetorheological effect and the electrorheological effect can effectively constrain and clamp abrasives for polishing processing. This paper proposes a magneto-electric synergy rheological finishing (MERF) method. Based on a magnetoelectric composite field simulation, magnetoelectric synergistic rheological finishing equipment is built. A polishing slurry with both electrorheological and magnetorheological effects is prepared for processing a 2-inch single-crystal silicon wafer. Comb-type electrodes and cylindrical flat-bottomed magnetic poles are used to construct magnetoelectric composite fields. Under the action of a magnetoelectric composite field, a hemispherical polishing pad with abrasives distributed in strips can be obtained. By conducting a test, a smooth and gentle arc cross section of the removed contour can be obtained. The removal rate of MERF was 4.04 mg/h, which was between those of electrorheological finishing (ERF) and magnetorheological finishing (MRF). The surface roughness Ra reached 1.80 nm, and the depth and width of the machining traces were the largest. Magnetoelectric synergistic rheological finishing equipment can realize processing under electric fields, magnetic fields, and magnetoelectric composite fields. The MERF method can effectively enhance the semifixed binding force and distributional uniformity of the abrasive and achieve a more efficient and uniform planarization process.