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Experimental Study and Modeling of Silicon Supersaturated with Selenium by Ion Implantation and Nanosecond-Laser Melting

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Experimental Study and Modeling of Silicon Supersaturated with Selenium by Ion Implantation and Nanosecond-Laser Melting F.F. Komarova,∗, G. Ivlev, G. Zayats, A. Komarov, N. Nechaev, I. Parkhomenko, L. Vlasukova, E.… Click to show full abstract

Experimental Study and Modeling of Silicon Supersaturated with Selenium by Ion Implantation and Nanosecond-Laser Melting F.F. Komarova,∗, G. Ivlev, G. Zayats, A. Komarov, N. Nechaev, I. Parkhomenko, L. Vlasukova, E. Wendler and S. Miskiewicz A.N. Sevchenko Institute of Applied Physical Problems, Belarusian State University, Kurchatov Str. 7, 220045 Minsk, Belarus Belarusian State University, Nezavisimosti Ave. 4, 220030 Minsk, Belarus Institute of Mathematics, National Academy of Sciences of Belarus, Surganov Str. 11, 220072 Minsk, Belarus Friedrich-Schiller University Jena, Max-Wien-Platz 1, 07743 Jena, Germany

Keywords: experimental study; supersaturated selenium; selenium ion; modeling silicon; silicon supersaturated; study modeling

Journal Title: Acta Physica Polonica A
Year Published: 2019

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