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Quantum optical lithography, a diffraction-unlimited method, was applied to pattern monolayer graphene at 10 nm resolution. In our tests with chemical vapor deposition monolayer graphene samples, we have succeeded in… Click to show full abstract
Quantum optical lithography, a diffraction-unlimited method, was applied to pattern monolayer graphene at 10 nm resolution. In our tests with chemical vapor deposition monolayer graphene samples, we have succeeded in producing flat surfaces of a sandwich of monolayer graphene-resist on Si, Si3N4, or glass substrates. Complex patterns have been written on monolayer graphene samples by a nanoablation process. The method could be used to realize monolayer graphene nanodevices.
Keywords:
monolayer graphene;
quantum optical;
optical lithography;
monolayer
Journal Title: Applied optics
Year Published: 2021
Link to full text (if available)
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Journal Title: Applied optics
Year Published: 2021
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!