Photo from wikipedia
In this paper, we develop a new technique, to the best of our knowledge, of grating characterization based on two separate steps. First, an artificial neural network (ANN) is implemented… Click to show full abstract
In this paper, we develop a new technique, to the best of our knowledge, of grating characterization based on two separate steps. First, an artificial neural network (ANN) is implemented in a classifier mode to identify the shape of the geometrical profile from a measured optical signature. Then, a second ANN is used in a regression mode to determine the geometrical parameters corresponding to the selected geometrical model. The advantage of this approach is highlighted by discussions and studies involving the error criterion that is used widely in scatterometry. In addition, experimental tests are provided on diffraction grating structures with a period of 500 and 750 nm.
Journal Title: Applied optics
Year Published: 2021
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!