LAUSR

It is known that the phase response of spatial light modulators (SLMs) measured by double-beam interferometers is sensitive to mechanical and environmental disturbances. This paper proposes a Shack-Hartmann wavefront sensor (SHWS) method to measure the phase response characteristics of the SLM. The results show that the phase modulation depth measured by the proposed method is 1.7581λ, and 1.7993λ by the Twyman-Green interferometer method. The difference in the phase modulation depth between the two methods is only 0.0412λ, and its relative error rate is 2.29%. It proves that the phase modulation accuracy obtained by the SHWS with lenslets of 73*73 used in this paper is equivalent to that of the Twyman-Green interferometer. Compared with the interferometer method, the SHWS method is simple, compact, and robust, has good real-time performance, and is relatively vibration insensitive. In the future, the SHWS method will play a more important role in the detection of the SLM's phase response.